Impact of static magnetic fields on the radial line slot ... The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity control requirements are driven by the precision demands of new device technologies. Radial Line Slot Antennas | Request PDF A radial line slot antenna (RLSA) is a nonresonant multimode waveguide slotted array. To improve the power handing capacity, we design a radial line slow wave structure which replaces a ... Computational modeling study of the radial line slot antenna ...
Design of Radial Line Slot Antennas at 8.3 GHz for Large ...
Sep 15, 2015 ... Results showed that, a uniform line-shaped plasma is generated as waveguide ... gas through slot-antenna, is suitable for large area plasma generation ..... radial plasma density profiles in low-pressure surface wave plasma ... Near-Field Distribution of Radial Line Slot Antenna for ... the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested. Radial Line Slot Antennas - Home - Springer Radial Line Slot Antennas Hiroyuki Arai* Yokohama National University, Yokohama, Kanagawa, Japan Abstract This chapter presents the development history of radial line slot antenna. The antennas are used for circular polarized high-gain antenna in microwave and millimeter wave bands. Linearly polarized arrays Radial Line Slot Antennas | SpringerLink Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these ...
Our research themes are planar slotted waveguide antennas and electromagnetic theory. Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University.
A slot antenna consists of a metal surface, usually a flat plate, with one or more holes or slots ... Slot antennas are often used at UHF and microwave frequencies instead of line antennas when greater control of the radiation pattern is required. ... Plasma antenna · Quad antenna · Reflective array antenna · Regenerative loop ... Radial Line Slot Antennas - Springer communication antenna, plasma etching, and high power use. ... Radial line; Slot antenna; Circular polarization; Linear polarization; Direct broadcast satellite; ... Characteristics of large-diameter plasma using a radial-line slot antenna Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and ... Design of a Concentric Array Radial Line Slot Antenna for High-Power ... Jan 27, 2015 ... A compact concentric array radial line slot antenna (CA-RLSA) operating at ... Published in: IEEE Transactions on Plasma Science ( Volume: 43 ...
US6870517B1 - Configurable arrays for steerable antennas and…
Beam broadened radial line slot array antenna for... Characteristics of a Radial Line Slot Antenna for 12 GHz Band Satellite TV Reception. IEEE Transactions on Antennas and Propagation.High Gain Radial Line Slot Antennas for Millimetre Wave Applications," IEE Proceedings Microwaves, Antennas and Propagation. Analysis of a high power microwave radial line slot … A traditional radial line slot antenna (RLSA) is a high gain planar array. To improve the power handling capacity, we design a radial line slow wave structure which replaces a traditional dielectric sheet in the radial waveguide of the traditional RLSA. This high power microwave (HPM) RLSA is fed from a... Low sidelobes for radial line slot antennas
On the Near-Field Shaping and Focusing Capability of a ...
A Model for Antenna-Plasma Wave Co upling towards Control of ... A Model for Antenna-Plasma Wave Co upling towards Control of Uniformity in Slot-Excited Microwave Discharges Daichi SAWADA, Akihiro TSUJI, Takanori KITSUDO, Yasuyoshi YASAKA, and Hiromasa TAKENO Department of Electrical and Electronic Engineering, Kobe University, 1-1 Rokkodai, Nada, Kobe 657-8501, Japan Near-Field Distribution of Radial Line Slot Antenna for ... the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested. Radial Line Slot Antennas | SpringerLink
A Design of Compact Radial Line Slot Array (RLSA) Antennas for Wi-Fi Market Needs Teddy Purnamirza1, *, Donny Kristanto 1,andImranM.BinIbrahim2 Abstract—This paper proposes a compact Radial Line Slot Array (RLSA) antenna for 5.8GHz Wi-Fi devices, which meets market needs. Various small RLSA antenna models with radius of 140mm, were Electrically Reconfigurable Radial Waveguides and Their ... Electrically Reconfigurable Radial Waveguides and Their Potential Applications in Communications and Radars Systems Halim Boutayeb* Abstract—In this work, different configurations of electrically reconfigurable radial waveguides are ... radial-line slot array antenna with electrically beam-steering ability is proposed. 1. INTRODUCTION A Millimeter-Wave Cavity-Backed Suspended Substrate ... A Millimeter-Wave Cavity-Backed Suspended Substrate Stripline Antenna Rainee N. Simons Dynacs Engineering Company, Inc., Brook Park, Ohio ... Recently a radial line slot antenna array has been demonstrated to have high gain and effi- ... A Millimeter-Wave Cavity-Backed Suspended Substrate Stripline Antenna 6. AUTHOR(S) Characteristics of large-diameter plasma using a radial-… The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity controlLarge volume diffusion plasmas, of which the radial line slot antenna source is one type, must overcome transport effects or diffusion modes...